ABSTRACT
The effects of the number of panels on the plasma parameters are shown in Figure 13.12, in which TMS DC cathodic polymerization on multiple panels was conducted with power operation mode under a fixed plasma condition of DC 5W, 1 sccm TMS, and 50mtorr. As seen from Figure 13.12a, with the same DC power input of 5W, the increase of the panel numbers showed little effect on the DC voltage and current during the deposition. As the panel number increased from 5 to 30, the voltage decreased by about 50V on a 500-V base and the current increased by about 2mA on a 20-mA base. Figure 13.12b shows the panel number dependence of the current density and TMS deposition rate on the panel surfaces. With the increase of the panel numbers, a decreasing trend was observed for the deposition rate due to the decrease of DC current density. When the deposition rates on the panels (cathodes) were plotted against the current density, a linear dependence of deposition rate on current density is confirmed.
