ABSTRACT
The AMT plasma system is an asymmetrical electrode system (small anode and large cathode), which has the capability to overcome the problems mentioned above [1]. Figure 17.1 depicts the structure of an anode magnetron electrode, which is essentially a magnetron electrode with a gas inlet in the center. A schematic diagram of the anode magnetron in the AMT plasma system is shown in Figure 17.2. An electrode with magnetic field enhancement is placed snugly inside a glass tube. However, its position within the tube can be easily varied. The distance between the end of the glass tube to cathode surface (gap distance), a, and the distance between the anode surface to the cathode surface (electrode distance), b, can be varied independently. The kidney-shaped open space in front of the cathode represents the cathode dark space, which is represented by the cathode dark space thickness (CDST). CDST e1 represents the minimal thickness, and DCST e2 represents the thickness at the inner diameter of the glass tube. The dashed space represents the luminous gas phase created by the anode magnetron discharge of Ar. The carrier gas, Ar, is fed through the center hole of the electrode. The glass tube provides physical confinement of the gas flow, as well as support and insulation of the anode. This anode system is called the anode magnetron torch (AMT). If an anode system has no magnetic enhancement, it is simply called an anode torch (AT). A schematic diagram of the entire reactor system is shown in Figure 17.3.
