ABSTRACT

Lapping is generally applied to the rough processing before the finishing

process, or to the intermediate processing, depending on the types of workpieces

and the intended purposes. Lapping, which is one of the polishing processes

aimed to obtain better accuracy of the shape, employs loose abrasive processing

methods. Lapping slurry is supplied onto the rotating hard tool (lapping plate),

against which workpieces are pressed down, and the relative movements among

the workpieces, abrasives, and rotating plate are performed. Lapped surfaces

appear to be a frosted glass. Lapping is a typical processing method integrated

before the polishing process in the fabrication process of glass lens, prisms,

quartzes, and silicon wafers for LSI.