ABSTRACT
Lapping is generally applied to the rough processing before the finishing
process, or to the intermediate processing, depending on the types of workpieces
and the intended purposes. Lapping, which is one of the polishing processes
aimed to obtain better accuracy of the shape, employs loose abrasive processing
methods. Lapping slurry is supplied onto the rotating hard tool (lapping plate),
against which workpieces are pressed down, and the relative movements among
the workpieces, abrasives, and rotating plate are performed. Lapped surfaces
appear to be a frosted glass. Lapping is a typical processing method integrated
before the polishing process in the fabrication process of glass lens, prisms,
quartzes, and silicon wafers for LSI.