ABSTRACT
There are two aspects of chip integration: one is concerned with the problems created by topography (Section 6.2 through Section 6.24) and the other with the compatibility of materials and processing (Section 6.25 through Section 6.31).
There are two aspects of chip integration: one is concerned with the problems created by topography (Section 6.2 through Section 6.24) and the other with the compatibility of materials and processing (Section 6.25 through Section 6.31).