ABSTRACT
Micro-Electro-Mechanical Systems (MEMS) is a technology that incorporates miniature mechanical components and integrated circuits (IC) to build sensors, actuators, and microsystems (Bustillo et al. 1998). Mass production and cost reduction are possible with MEMS technology compared to traditional sensor/actuator manufacturing technologies. Many MEMS sensors and actuators in micrometer scale have found applications in the automotive industry (Fleming 2001), biotechnology (Bashir 2004), and wireless communications (Rebeiz 2003).
