ABSTRACT
Transmitting Fiber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 267 7.2 X-Ray Photoelectron Spectroscopy (XPS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 271
7.2.1 Experimental Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 271 7.2.2 Analysis of XPS Spectra . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 273 7.2.3 Actual Trends in X-Ray Photoelectron Spectrometry
Development . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 274 7.3 Analysis with Ion Beams by Energy Loss Spectroscopy . . . . . . . . . . . . . . . . . . . 276
7.3.1 Rutherford Backscattering Spectrometry . . . . . . . . . . . . . . . . . . . . . . . . . . . 276 7.3.2 Elastic Recoil Detection Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 277
7.4 Matrix-Assisted Laser Desorption/Ionization, Secondary Ion Mass Spectrometry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 278
7.5 X-Ray Diffraction and Reflection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 280 7.5.1 Grazing Incidence X-Ray Diffractometry . . . . . . . . . . . . . . . . . . . . . . . . . . 280 7.5.2 X-Ray Reflectometry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 282
7.6 Radical Investigation by Electron Spin Resonance . . . . . . . . . . . . . . . . . . . . . . . . . 282
An important application of plasma chemistry is the reactive treatment of surfaces and the deposition of thin films. The analysis of these surfaces and films is essential for understanding of the mechanisms of the treatment and deposition processes which facilitate developments and optimization activities, too. The diagnostics include conventional chemical, like elementary analysis, and physical methods, like microscopy, or methods which are specially developed for this purpose. An overview on thin film and surface properties and corresponding diagnostic methods are presented in Table 7.1.
