ABSTRACT

Many plasmas in technological applications are ideal, weakly ionized, and nonthermal as already mentioned in Chapter 2. Hence, the following introduction into plasma modeling is restricted to this kind of plasma, which covers the large range of pressures from about 10−2 to 106 Pa at ionization degrees between about 10−6 and 10−3. Over this range, many different mechanisms and principles of plasma generation as well as

FIGURE 9.1 Components of plasma modeling. (From Graves, D.B., IEEE Trans. Plasma Sci., 22, 31, 1994.)

processes at quite different temporal and spatial scales have to be taken into account in plasma modeling.