ABSTRACT
In this chapter, typical topics of general interest are briefly presented, which illustrate the broad spectrumof applications. Dry air plasma chemistrywith ozone generation or lacquer stripping and ashing reactions are briefly discussed. Plasma etching presents a key technology in integrated circuit production. Methane gas reformation as well as diamond deposition are important topics of hydrocarbon plasma chemistry. The formation of pre-biochemical compounds is observed in nonthermal plasmas, too. Thin film generation as plasma polymers, of metallic compounds and silicone-based cells are products of plasma chemical processes. Detailed discussions of selected topics are given in Chapter 8.
