ABSTRACT
Thin films are thin material layers with thickness ranging from a nanometer to several micrometers. Electronic semiconductor devices and optical coatings are the main applications benefiting from thin film construction [1-3]; ferromagnetic thin films are recently used for high-density data storage [4,5]; it is also being applied to biology and iatrology, via thin film drug delivery [6] and biocompatible coating [7]; ceramic thin films are in wide use, the relatively high hardness and inertness of ceramic materials make this type of thin coating of interest for protection of substrate materials from corrosion, oxidation, and wear [8-10].
