ABSTRACT
A biosensor, described succinctly by Ziegler and Gopel (1998), is “a device integrated with a biological sensing element, which is a product derived from a living system and a signal transducer which can provide a recognition signal of the presence of a specic substance”. The biological sensing element, which determines the specicity of the biosensor, can be composed of an enzyme, an antibody, a nucleic
43.1 Introduction ...................................................................................................................................747 43.1.1 Nanoelectrical Sensors .................................................................................................... 748 43.1.2 Breast Cancer Diagnostics............................................................................................... 750
43.2 Materials ...................................................................................................................................... 750 43.2.1 Wafer-Level Fabrication in Silicon-Based Materials ...................................................... 750
43.2.1.1 Silicon Wafers .................................................................................................. 750 43.2.1.2 Design Features.................................................................................................751
