ABSTRACT
This chapter deals with the phenomena arising when elec trons are generated within a vacuum chamber. Electron beam machining depends for its operation upon such effects. Its principles form the bases for the technique of electron beam lithography discussed in the next chapter. Some of the earliest work on the utilization of the electron beam for material re moval can be attributed to Steigerwald, who designed a proto type machine in 1947. Modern electron beam machines work on the same principles.
