ABSTRACT
Nano-electro-mechanical systems (NEMS) integrate mechanical structures and electrical circuitry into one system. In other words, NEMS devices typically include transistor-like nanoelectronics with mechanical components such as cantilever, free-standing pillar, suspended beam, suspended thin lm, nanochannel, nanopore, valves, actuators, pumps, or motors, and may thereby to be used for chemical, biological, and physical devices. At least one dimension of the mechanical device is below 100 nm (300 nm in some cases), and this nanoscale dimension enables unique and critical attributes for these systems. In terms of active functions, NEMS devices can perform a broad range of tasks such as oscillation, resonance, switching, ltering,
2.1 Introduction .................................................................................................... 13 2.2 Miniaturization ............................................................................................... 14 2.3 NEMS Processes ............................................................................................ 15
2.3.1 Top-Down Semiconductor Processes ................................................. 15 2.3.2 MEMS Processes ................................................................................ 18 2.3.3 Lithography and Other Patterning Techniques ................................... 19
2.3.3.1 Stamp-on-Substrate ............................................................. 19 2.3.3.2 Write-on-Substrate ............................................................... 19 2.3.3.3 Electron Beam Lithography .................................................20 2.3.3.4 Focused Ion Beam Milling ..................................................20 2.3.3.5 Nanosphere Lithography ......................................................20
