ABSTRACT
Chapter 8 is assembled into the following key sections: 8.2 Overview, 8.3 Microsensors, 8.4 Microactuators, and 8.5 Biochips.
8.2 OVERVIEW As a chapter overview, MEMS devices are basically control systems on a chip. We previously discussed control systems in Chapter 5 (Figure 5.24). is gure has been recongured into Figure 8.1 to make it relevant for MEMS sensors and actuators in this chapter.
