ABSTRACT

Figure 2 shows the AFM images of the interferometric patterns recorded on PMMA for angles of 15, 19 and 22 degrees corresponding to imprinting gratings of periods d - 92, 72 and 63 nm respectively. As can be seen the 92 nm pattern consists of lines of well defined edges and an average modulation depth of 12.5 nm. For smaller line periods the modulation depth decreases and the line edge roughness increases significantly.