ABSTRACT

Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092 Abstract: The x-ray laser Mach-Zehnder interferometer is an important tool to measure the electron densities of a laser-produced plasma near the critical surface. The design of a multilayer beam splitter at 13.9nm for soft x-ray laser Mach-Zehnder interferometer is completed based on the standard of designs of maximizing product of reflectivity and transmission of the beam splitter. The performance of semitransparent beam splitter is simulated using interface roughness and interdiffusion. The beam splitter which is Mo/Si multilayers on lOmmxlOmm area SÍ3N4 membrane is fabricated by using the magnetron sputtering. The figure error of the beam splitter has reached the deep nanometer magnitude by using optical profiler and the product of reflectivity and transmission of the beam splitter measured by synchrotron radiation is about 4%.