ABSTRACT

Y. Q. Liu1, J. Zhang1, Z. L. Chen1, and X. Y. Peng1, Ch. H. Nam2 optical Laboratory of Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China department of Physics and Coherent X-ray Research Center, Korea Advanced Institute of Science and Technology, Taejon 305-701, Korea

Abstract. Optimization of a grazing incidence soft x-ray flat field spectrometer with toroidal mirror as a relay optics system is performed using a ray tracing code and path function theory. The optimised spectrometer provides a good spectral resolution QJAX) better than 1000 and a spatial resolution better than 40 um in the spectral range of 4-45nm.