ABSTRACT
Interest in using conjugated polymers and metal-doped polymers for electro-optic applications has been increasing [1-8]. New conducting polymers and functional thin films are goals of this field. Deposition methods for the films are also of importance. Many scientists have explored the preparation of organic molecular thin films by vacuum deposition [9], chemical vapor deposition (CVD) [10], ionized cluster beam (ICB) deposition [11], and organic molecular beam epitaxy (OMBE) [12]. It is desirable for a deposition method to be capable of controlling the film structure and so obtaining optimal properties. The ICB deposition can satisfy the need to deposit thin films [13]. It is a promising method for the preparation of metal, semiconductor, and polymer complex thin films because of its ability to control the structure and properties of the deposited thin films on the basis of the electric parameters of the ICB. In order to control the structure of the deposited organic thin films more effectively and fabricate films with different structural properties by the ICB method, we introduced a time-of-flight mass spectrometer (TOFMS) [14] in the ICB system to monitor in situ the size and distribution of the depositing organic clusters. Using the ICB deposition method, series of organic and inorganic-organic complex thin films with functional properties have been fabricated.
