Automated analysis of submicron particles by CCSEM/EDXS—where are the limits?
Research Institute for Electron Microscopy, Graz University of Technology, Steyrerg. 17, A - 8010 Graz, Austria * Institute of Chemical Engineering Fundamentals and Plant Engineering, Graz University of Technology, Inffeldg. 25, A - 8010 Graz, Austria
ABSTRACT: The analysis of submicron particles by SEM / EDXS is hampered by a lot of difficulties. Two of them are the dependence of the measured particle sizes on the type of detector used, and specimen drift in connection with X-ray analysis. In general, automated analysis of particles down to diameters of around 50 nm seems feasible, albeit with decreasing accuracy of both the geometrical parameters and the quantitative results of the X-ray analysis.