3D reconstruction of surface and subsurface structures of solids by SEM stereo images

ABSTRACT: The stereo method in SEM, implying the investigation of several images of the same region, allows to obtain the exact quantitative three-dimensional information on solid microrelief characteristics. The method is realized in the specialized PC software “STERECON” aimed to carry out an efficient SEM stereo image analysis resulting in a 3D digital model of the surface and sub-surface structures under investigation.