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Analytical electron microscopy of laser-deposited metal patterns

ABSTRACT: The microstructure and composition of excimer laser deposited platinum patterns have been studied by transmission and scanning electron microscopy and X-ray photoelectron spectroscopy. The metal patterns were produced by irradiating a layer of a metal-organic compound with the output from a krypton fluoride excimer laser through a chromium-on-quartz photomask. XPS analyses have confirmed that UV irradiation reduces the platinum to the metallic state. High-resolution metal patterns have been produced using this technique and examples of 5 pm platinum tracks are presented.