Element specific nanoscale electron tomography
ABSTRACT: Using inelastically scattered electrons only, a chemically sensitive mode of electron tomography is developed. EFTEM/ESI in an imaging energy filter microscope is coupled to single tilt series tomography, which allows 3D-maps of chemical composition to be reconstructed by backprojection on a resolution of a few nm and a field of view of a few hundred nm. The nanocomposite FeAl + Y20 3 is used as model application. The selection of (multiple) energy loss windows and the minimisation of artefacts are discussed.