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Chapter

Focused ion beam damage: its characterisation and minimisation

Chapter

Focused ion beam damage: its characterisation and minimisation

DOI link for Focused ion beam damage: its characterisation and minimisation

Focused ion beam damage: its characterisation and minimisation

Edited ByM. Aindow, C. J. Kiely

BookElectron Microscopy and Analysis 2001

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Edition 1st Edition

First Published 2001

Imprint CRC Press

Pages 4

eBook ISBN 9780429175527

ABSTRACT

Paper presented at Electron Microscopy and Analysis Group Conf. EMAG2001, Dundee, 2001 ©200110P Publishing Ltd

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