ABSTRACT
Miniaturization methods and materials are well developed in the integrated circuit industry. They have been used in other industries to produce microdevices, such as camera and watch components, printer heads, automotive sensors, micro-heat exchangers, micropumps, microreactors, etc., in the last 15 years.[1,2] These new processes are known as microelectro-mechanical systems (MEMSs), with a combined international market of over US$ 15 billion in 1998.[3] In recent years, MEMS applications have also been extended to the optical communication and biomedical Šelds. The former are called micro-optic electromechanical systems (MOEMSs), while the latter are known as biomicroelectromechanical systems (bioMEMSs). Potential MOEMS structures include optical switches, connectors, grids, diffraction gratings, and miniature lenses and mirrors. Major potential and existing bioMEMS products are biochips/sensors, drug delivery systems, advanced tissue scaffolds, and miniature bioreactors.
