ABSTRACT
This chapter presents, for the first time, a formal introduction to a comprehensive surface feature characterization technique for microelectromechanical systems/microoptoelectromechanical systems (MEMS/MOEMS) and semiconductor devices. It provides a brief introduction to the basic concepts in ISO standards for the characterization of surface texture and then concentrates on the provision of a generalized technology for assessment of MEMS surface features, namely form removal and de-noising, through surface feature extraction and finally to the quantification of surface feature attributes. It intends to provide an enriched surface feature characterization toolkit, for both controlling MEMS/MOEMS manufacturing processes and predicting functional performance of microcomponents that rely on specified surface geometry features.
