ABSTRACT

Nanometrology is the science and practice of measurement of functionally important, mostly dimensional parameters and components with at least one critical dimension, which is smaller than 100 nm. e application and use of nanomaterials in electronic and mechanical devices, optical and magnetic components, quantum computing, tissue engineering, and other biotechnologies, with smallest features widths well below 100 nm, are the economically most important parts of the nanotechnology nowadays and presumably in the near future. In parallel with the shrinking dimensions of the components and structures produced in the relative industries, the required measurement uncertainties for dimensional metrology in these important technology elds are decreasing too (Bhushan 2004, Nomura et al. 2004).