ABSTRACT
An important domain of nanotechnology is the nanostructuration that involves numerous scientific and economic challenges (Gentili et al. 1994; Bucknall 2005). In particular, the innovative trend of modern technology lies in smaller, cheaper, faster, and better performances. e industry must improve yield by increasing smaller instruments. For instance, cars, cameras, and wireless telephone have combined many functions in a small box. Nanotechnology is an exact example of this trend representing complex technology in commodities. During the last few years, novel structures, phenomena, and processes have been observed at the nanoscale from a fraction of nanometer to about 100 nm, and new experimental, theoretical, and simulation tools have been developed for investigating them. ese advances provide fresh opportunities for scienti c and technological developments in nanoparticles, nanostructured materials, nanodevices, and nanosystems. From the practical e ect, the miniaturization of integration circuit and systems means the reduction of raw materials and energy waste. e smaller products are conducive to transportation and utilization, which proves to have more advantages of miniaturization over traditional products. In order to t into the development of modern technology, the advances of nanotechnology are in urgent needs for its bene ts. So the development of nanotechnology is driven by both science itself and market. is context explains why nanolithography and matter nanostructuration are important branches of nanotechnology (Gentili et al. 1994), envisioning various applications
and research elds including ultrahigh density storage, nanoelectronics, nanomechanics, and nanobiotechnology.
