Nanohole Arrays on Silicon
Nanostructured materials not only have potential technological applications in various šelds, but are also of fundamental interest in that the properties and functions of a material can change with the transition between the bulk and atomic/ molecular scales. In particular, silicon with ordered pores of dimensions ranging from submicrometer to nanometer range, so-called porous silicon, has generated considerable interest in both basic research and commercial applications because of the electrochemical properties of silicon. ™erefore, many investigations have been carried out on the surface chemistry and semiconductor electrochemistry of silicon and the development of novel techniques enabling the fabrication of unique nano-/ microstructures. For a general background to the use of electrochemistry in silicon technology, see the important reference books listed in the bibliography [1,2].