chapter  28
14 Pages

Nanohole Arrays on Silicon

Nanostructured materials not only have potential technological applications in various šelds, but are also of fundamental interest in that the properties and functions of a material can change with the transition between the bulk and atomic/ molecular scales. In particular, silicon with ordered pores of dimensions ranging from submicrometer to nanometer range, so-called porous silicon, has generated considerable interest in both basic research and commercial applications because of the electrochemical properties of silicon. ™erefore, many investigations have been carried out on the surface chemistry and semiconductor electrochemistry of silicon and the development of novel techniques enabling the fabrication of unique nano-/ microstructures. For a general background to the use of electrochemistry in silicon technology, see the important reference books listed in the bibliography [1,2].