ABSTRACT
A large number of individual elementary processes are important in determining the kinetics of low-temperature plasma. The basic processes in the gas phase include collisions of electrons, ions, and fast neutrals with molecules of the feed gas and with surfaces. Collisions between charged particles, collisions between excited particles, and collisions of radicals with gas molecules are also important. In addition, one needs to consider ion-molecule reactions and different types of photon interactions with molecules, excited species, and surfaces. It is essential to understand the nature of elementary processes in order to investigate the collective phenomena and kinetics of plasmas as a whole. Electron collisions are particularly important, because they can produce new electrons and ions under most conditions and also produce the chemically active species required for numerous plasma applications.
