ABSTRACT

Swarm parameters are generally applied to plasma modeling and simulations. At the same time, the nonequilibrium regime in discharges is well represented under a broad range of conditions by using the Boltzmann equation, as discussed in the previous chapter. In this chapter we discuss the basic features of transport coefficients (swarm parameters) of electrons and also, to a lesser degree, of ions. Together with transport data we compile cross sections of the electron for interesting gases. First we discuss the basic characteristics of the E/N dependence of the coefficient for swarms in the hydrodynamic regime. We consider swarms in direct current (DC) fields and also in time-varying radio frequency (rf) fields. Collective phenomena that cannot be easily described on the basis of single electron dynamics are labeled kinetic phenomena, and some special examples are described. Differences between the transport in conservative and nonconservative situations (i.e., when there are number-changing collisions such as ionization and attachment) are briefly considered.