ABSTRACT
A wafer fabrication facility was recently upgraded from 150mm (6-inch) to 200mm (8inch) wafer production, a project that involved the purchase of a considerable amount of capital wafer processing equipment. Although industry ergonomics guidelines existed, and the manufacturer’s application of these guidelines was a corporate requirement for the purchase of new equipment, there was not an effective tracking system in place to ensure that all new equipment met these guidelines. The ESHEER (Environmental, Safety, Health and Ergonomics Equipment Report) process was developed as a means to track and document safety and ergonomics issues associated with new equipment. This process has been an effective means of ensuring that equipment suppliers conform to established industry guidelines.
