ABSTRACT
Highly accurate miniaturized components are increasingly in demand for various industries such as aerospace, electronics and automotive. Micromachining is an ultra-precision material removal process to achieve micro-accuracy and nanometers finish (Liang 2006.). Micro-machine tool is developed for the manufacture of micro-features. And due to the small size of the machine components, the vibration excitation is easier than the traditional machine. The dynamic characteristics of the machine tools and process are critical in the applications of micro-machining technology. Understanding of the dynamic response of the micro-system is critical prior to reducing vibration.
