ABSTRACT
This chapter focuses on the development of Vacuum Ultraviolet (VUV) photoconductive detector based on YF3 thin films. YF3 thin films were grown by Pulsed Laser Deposition (PLD) method. The current value of the detector increased 3-digit before and after VUV irradiation at an applied bias of 300 V The size of the YF3 particles, which constituted the thin films, was controlled by laser fluence and substrate heating temperature during PLD. Such filterless VUV photoconductive detector is expected to be a strong substitution of conventional detector and play important role in monitoring of the VUV light sources. Photoconductivity was evaluated by measuring the current value under non-VUV irradiation and under VUV irradiation by a deuterium lamp. This VUV photoconductive detector was expected to be a strong substitution of conventional detector and expanded further application not only monitoring of the VUV lamp but also radiation detection.
