ABSTRACT
This chapter discusses a vision based measurement system for precise feedback control of a three degree of freedom stage. It presents a method of measuring 3 degree of freedom displacements with two vision cameras and two reference images. The vision system was applied to a flexure based precise three degree of freedom stage and evaluation test was implemented. It was confirmed that the proposed measurement system is valid for evaluation of a three degree of freedom stage. A vision based measurement system was developed for precise feedback control of a three degree of freedom stage. The vision system was applied to a flexure based precise three degree of freedom stage and evaluation test was implemented. By measuring the two degree of freedom displacements, using digital image correlation, of each reference image which is attached on the moving part of the stage, the three degree of freedom displacements of the stage can be calculated.
