ABSTRACT
ABSTRACT: Titanium dioxide, or TiO2, is a well-known sensor material. We have investigated the impedance characteristics and surface roughness of two different types of devices involving TiO2-coated planar interdigital electrodes. One of them has a silicon dioxide (SiO2) insulation layer, the other one is built up without this layer. In this contribution, the response to selected hydrocarbons and humidity (at a temperature near 300 °C) and the influence of the substrate material will be discussed in some detail.
