ABSTRACT
The setting up of the problem of nanofilm deposition onto the templates of porous aluminum oxide is given in this chapter. The variants of epitaxial burying of porous templates based on aluminum oxide by atoms of different types are illustrated. Different interaction processes of nanostructures and mechanisms of burying the templates and pores were registered for different types of atoms being deposited. Single atoms, which reached the pore bottom, were observed for all types of atoms being deposited. The most complete and dense pore burying was registered during gallium epitaxy.
