ABSTRACT

With IC technology continuing to advance, the analysis of very small structures remains critically important. Microscopy of Semiconducting Materials provides an overview of advances in semiconductor studies using microscopy. The book explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigat

chapter |46 pages

Dislocations and boundaries

chapter |98 pages

Epitaxy: growth phenomena

chapter |76 pages

Epitaxy: defect formation

chapter |94 pages

Epitaxy: wide band-gap nitrides

chapter |108 pages

Processed silicon and related materials

chapter |38 pages

Metallization, siIicides and contacts

chapter |40 pages

Device studies and specimen preparation

chapter |30 pages

Scanning probe microscopy