ABSTRACT

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

chapter 5|36 pages

Featute Scale Modeling

chapter 8|30 pages

Sputtering and Sputter Deposition

chapter 11|38 pages

Ion Beam Deposition

chapter 12|12 pages

Chemical Mechanical Polishing