ABSTRACT

Explaining principles underlying the main micromachining practices currently being used and developed in industrial countries around the world, Micromachining of Engineering Materials outlines advances in material removal that have led to micromachining, discusses procedures for precise measurement, includes molecular-level theories, describes vapo

chapter 1|14 pages

Introduction

chapter 2|48 pages

Measurement Techniques in Micromachining

chapter 4|40 pages

Abrasive Micromachining and Microgrinding

chapter 5|22 pages

Diamond Micromachining

chapter 6|32 pages

Ultrasonic Micromachining

chapter 7|24 pages

Microelectrodischarge Machining

chapter 8|36 pages

Laser Micromachining

chapter 10|22 pages

Ion Beam Machining

chapter 11|26 pages

Electron Beam Machining

chapter 12|44 pages

High-Resolution Lithography