ABSTRACT
Change of Polypyrrole Test Lines .......................................................... 374 13.2.4 Integration of Polypyrrole Microstructures
with Silicon Devices ............................................................................................... 376 13.2.4.1 Fabrication of an Optically Controlled Polypyrrole
Microstructure ....................................................................................... 377 13.2.4.2 Operation of the Device ......................................................................... 377
13.3 Polypyrrole Microactuators ................................................................................................. 378 13.3.1 Bilayer Actuators .................................................................................................... 378 13.3.2 Direct-Mode Polypyrrole-PDMS Microvalve ....................................................... 379
13.3.2.1 Microfabrication of the Active Part of the Microvalve ..........................380 13.3.2.2 Microfabrication of the Passive Microfl uidic Component ..................... 381 13.3.2.3 Microvalve Operation ............................................................................ 382
13.4 Polypyrrole Nanodevices ..................................................................................................... 383 13.4.1 Introduction ............................................................................................................ 383 13.4.2 Polypyrrole Nanowire Electropolymerization and Evaluation
of the Electrochemically Controlled Volume Change ........................................... 383 13.4.2.1 Removal of Hollow Region of Synthesized Polypyrrole
Nanowires by Mechanical Lapping ....................................................... 383 13.4.2.2 SEM Evidence of Electrochemically Induced Volume
Change in Polypyrrole Nanowires .........................................................384
