microParts.GmbH:.The.History.of.the.Development.of.a. Successful.German.Microsystems-Based.Business

Introduction............................................................................................................ 189 Origin.of.the.LIGA-Technology............................................................................. 190 Foundation.of.microParts.GmbH.—.First.Steps.into.Business.............................. 193 Products.................................................................................................................. 201

Nebulizer.for.Drug.Delivery.......................................................................202 TRUSPRAY.................................................................................................206 Microfluidics...............................................................................................207 Microspectrometer...................................................................................... 214

Technology............................................................................................................. 216 Intellectual.Property...............................................................................................220 Commercial.Results.(Sales,.EbiT).......................................................................... 221 Human.Resources.and.Organization......................................................................223 Conclusion..............................................................................................................225