ABSTRACT
The silicon integrated optical phased array based on edge couplers is fabricated and a high-speed indoor Optical Wireless Communications (OWC) system is demonstrated with the photonic integrated circuit. The photonic integrated circuit is fabricated using e-beam lithography, e-beam evaporation, inductively coupled plasma-reactive ion etching and plasma enhanced chemical vapor deposition. Photonic integrations aim to use advanced semiconductor technologies to realize integrated components, functions, circuits and transceivers for optical systems. In silicon integrated photonic circuits, optical signals propagate in silicon waveguides, which provide the light confinement and transmission function. The fundamental modes have the lowest waveguide propagation loss and bending loss, and such single-mode waveguide is normally used in silicon photonic integrated circuits to avoid mode crosstalk and coupling issues. The most widely used concept to deal with the polarization dependence limit of silicon photonic integrations is the polarization diversity.
