ABSTRACT

This book provides an in-depth description of x-ray microanalysis in the electron microscope. It is sufficiently detailed to ensure that novices will understand the nuances of high-quality EDX analysis. Includes information about hardware design as well as the physics of x-ray generation, absorption and detection, and most post-detection data processing. Details on electron optics and electron probe formation allow the novice to make sensible adjustments to the electron microscope in order to set up a system which optimises analysis. It also helps the reader determine which microanalytical method is more suitable for their planned application.

chapter 1|4 pages

History

chapter 2|14 pages

Principles

chapter 3|27 pages

The energy-dispersive X-ray detector

chapter 4|16 pages

Spectral processing

chapter 7|14 pages

X-ray mapping