ABSTRACT
EDX analysis in the SEM is, perhaps, the most common application of X-ray microanalysis. With care taken, it is possible to get very useful quantitative results from a wide range of materials. Unfortunately, it is also possible, especially for the novice, to misinterpret the data wildly. It is, therefore, critical that all users, not just those looking for accurate results, have a clear knowledge of the fundamentals of the technique, and the prerequisites for quality microanalysis. This contrasts, to some extent, with EDX microanalysis in the TEM, when, as we shall see in Chapter 6, some simplifications and approximations can be made, limiting-but not eliminating-the scope for major errors in interpretation. We will begin our discussion with a simple description of the SEM.
