ABSTRACT
Compact wearable communication systems can be designed using modern microwave technologies such as monolithic microwave integrated circuits (MMIC), micro-electro-mechanical systems (MEMS), and low temperature co-fired ceramic (LTCC) technologies. The communication industry in microwave and mm wave frequencies is currently seeing continuous growth. Traditional microwave systems consist of connectorized components connected by coaxial cables. These modules have large dimensions and suffer from high losses and weight. Monolithic microwave integrated circuits (MMICs) are circuits in which active and passive elements are formed on the same dielectric substrate. Accurate design is crucial in the design of MMIC circuits. Accurate design can be achieved by using 3D electromagnetic software. Lithography is the process of transferring a pattern onto the wafer by selectively exposing and developing photoreists. Etching can be isotropic or anisotropic. Etches can be dry or wet. Etches can be very selective or non-selective.
