ABSTRACT

This chapter describes passive elements, including the resistor, capacitor, inductor, transformer, interconnects, and transmission lines, which are widely used in the integrated circuits especially used in the radio frequency integrated circuit (RFIC) and millimeter- wave integrated circuits. It presents these passive elements with consideration of the high-frequency parasitic effects for radio frequency (RF) and millimeter-wave applications. The resistors in monolithic microwave integrated circuit (MMIC) and RFIC can be produced by using deposited thin metal films in doped regions of the semiconductor substrate, or multilayer polysilicon in silicon RF integrated circuit. The resistor in an integrated circuit (IC) chip has the highest tolerance compared with the other parts. The tolerance can be lowered by replacing a resistor with a combination of resistors with higher resistance. The spiral inductor is usually implemented on the top metal layer to reduce the series resistor and parasitic capacitance.