ABSTRACT
This chapter provides the technical background and reference information for guidance in planning, specification and application of wafer logistics and automated material handling systems (AMHS) for 300 mm diameter wafer fabrication factories. From an AMHS trend and roadmap perspective, overhead hoist vehicle transport has been the predominate means of transport in the first few generations of 300 mm fabs; however, it is expected that powered roller conveyors will be used more in the future due to increases in wafer carrier throughput requirements. The integration of wafer and reticle carriers, AMHS equipment, and controls systems into productive logistics systems is the challenging work of factory planning and automation engineering staffs. An identification (ID) system is employed to give each carrier a unique ID, and it is through this ID system that wafer and reticle carriers are tracked as they are moved between factories and within the fab, by both manual and AMHS.
