ABSTRACT
The Center for Nanoscale Mechatronics and Manufacturing (CNMM) was established in July 2002 under the 21st Century Frontier research and development Program organized by the Ministry of Science and Technology in South Korea. The ultimate goal of CNMM is to develop manufacturing technology with the capability of producing nanocomponents that are smarter, cheaper, and faster, with a minimum feature size in the range of 100 to 10 nm, and to secure the elementary technologies for the enabling tooling. Optical lithography and its resolution-enhanced technology have continued to be advanced and are viable in the production line for semiconductors, displays, optical devices, and various microsystems. Nanoimprint technology, one of the next generation patterning technologies, has been reported to pattern down to 10-nm linewidth in laboratory work. Nanoinjection molding technology with a metallic nanostamper has been regarded as a suitable mass-production process for replicating nanopatterns because of its low cost and short production cycle time.
