ABSTRACT
The number of applications for Microelectromechanical systems (MEMS) microheater devices is increasing rapidly, as they are the key components in a gas sensor system including humidity as well as toxic gas sensors. Microheater provides the requisite temperature for metal oxide–based gas sensor. A microhotplate is nothing but a miniaturized thin membrane that is thermally isolated from the bulk counterparts, which generally consists of a microheater to heat up the sensing layer and a temperature sensor to detect the temperature raised and contact electrode and to take the output of the sensor element. These types of MEMS structures are really useful while designing a power-efficient device. A thin-film gas sensor is utilized on a low power consumption micromachined silicon structure. Choosing a perfect material for the microheater is a challenge for the better performance of the gas sensor. The desirable features of a commercial gas sensor include significant sensitivity, specificity of detection, rapidity, less operator dependence, portability and low cost.
