ABSTRACT
With the continuing advance of VLSI technology, the size of individual transistors has been reduced significantly. Today, chips are already made with transistors that have nanometer scale and are a driving force for nanotechnology. This will continue to be the case for many years in the future. Yet, new and novel silicon nanodevices have appeared and others have been suggested. The behavior of such small devices, with characteristic lengths on a 5-20 nm scale, is described by quantum mechanics, and this brings new limitations into play.
