ABSTRACT
This chapter reviews various carbon nanotube (CNT) synthesis technologies and complementary metal-oxide-semiconductor (CMOS)-CNT integration approaches. It focuses on the localized heating CNT synthesis method, based on which the integration of CNT on foundry CMOS has been demonstrated. The monolithic integration requires not only high-quality nanotubes but also a robust fabrication process that is simple, reliable, and compatible with standard foundry CMOS processes. However, the CNT-based devices typically have large sizes, and their fabrication processes are not fully compatible with the standard foundry CMOS processes. The chapter describes that the process proposed for mock-CMOS microheater fabrication is fully transferable for releasing microheaters integrated in CMOS substrates. Platinum may not be available in foundry CMOS processes, and thus some other materials need to be used to form microheaters. Monolithic CNTCMOS integration has been demonstrated on foundry CMOS substrate by combining microelectromechanical system microfabrication and localized heating.
